The application of molybdenum rods in wafers
Molybdenum rods, with their outstanding properties such as a high melting point (2620°C), low thermal expansion coefficient (4.8×10-6/K), corrosion resistance, and high thermal conductivity (138 W/m·K), perfectly meet the extreme demands of wafer processing equipment. They play a crucial role in applications such as diffusion furnaces, CVD reaction chambers, and dry etching equipment.
Typical applications of molybdenum rods include heaters and heating elements (processed by machining, surface oxidation treatment and electrode connection for heating), wafer carrier components (such as trays and boats, processed by turning, milling, polishing or coating to achieve high-temperature stability and anti-pollution), plasma reaction chamber components (electrodes and shielding rings, with surface treatment to enhance anti-sputtering ability), and thermal field uniformization components (insulation screens and reflectors assembled from multiple layers of molybdenum sheets to reduce heat loss).
The manufacturing process of molybdenum rods is rigorous and standardized, with each step from raw material preparation to quality inspection being closely linked. High-purity molybdenum powder (≥99.95%) is selected as the raw material, which is then formed into blanks by isostatic pressing and sintered in a hydrogen atmosphere at 1800-2200°C to obtain dense molybdenum rods. In the mechanical processing stage, precision shaping is achieved through processes such as turning/milling, grinding (tolerance ±0.01mm), and EDM. Subsequently, recrystallization annealing is carried out to eliminate stress, and silicon diffusion treatment is performed to enhance oxidation resistance up to 1700°C. The surface is optimized through coating (such as Al2O3, Y2O3) or electrolytic polishing. Finally, quality is ensured through ultrasonic flaw detection and high-temperature creep tests (such as 100-hour load tests at 1000°C).
Molybdenum rods demonstrate significant advantages in wafer processing. They have better resistance to plasma erosion than graphite, are easier to process than tungsten, and can last for several years in reducing atmospheres such as H2. However, they also face challenges. At high temperatures (>600°C), they are prone to oxidation and require protection by an inert atmosphere or coating. Additionally, they are costly, and the recycling of waste through methods like electrolytic refining is necessary to control costs.
Mosten Alloy can produce molybdenum block, molybdenum foil, molybdenum wire, molybdenum processing workpiece according to customer demand.
