The application of molybdenum sheets in semiconductor diffusion furnaces and annealing furnaces: High-performance heating elements and heat insulation screens
In the semiconductor manufacturing process, diffusion furnaces and annealing furnaces are key heat treatment equipment, used for processes such as doping, oxidation and annealing of wafers. These processes have extremely high requirements for temperature control accuracy and thermal field uniformity. Molybdenum foils, due to their excellent physical and chemical properties, have become ideal materials for heating elements and heat insulation screens.
The excellent properties of molybdenum
Molybdenum foil is a high-melting-point metal (melting point 2620℃), and it can still maintain excellent mechanical strength and dimensional stability at high temperatures. The coefficient of thermal expansion of molybdenum foils is low, which can reduce the stress deformation during the thermal cycling process. Meanwhile, molybdenum sheets have good thermal conductivity and can achieve rapid heating and uniform heat distribution. In addition, molybdenum sheets are resistant to corrosion and oxidation at high temperatures (in combination with inert gases or vacuum environments), and have a low vapor pressure, which avoids contaminating semiconductor materials.
2. Application as molybdenum heating elements
In diffusion furnaces and annealing furnaces, molybdenum sheets are often processed into molybdenum strips or molybdenum helical heating elements. Its high resistivity enables it to efficiently convert electrical energy into thermal energy, and it has a long high-temperature lifespan and superior stability compared to traditional materials such as nickel-chromium alloys. Molybdenum heating elements can operate stably within the range of 1200℃ to 1800℃, meeting the requirements of semiconductor processes for high-temperature clean environments.
3. Its function as a molybdenum heat insulation screen
Molybdenum sheets can also be made into multi-layer heat insulation screens, which are used for homogenizing the thermal field inside the furnace chamber and reflecting thermal energy. Its high reflectivity and low heat loss characteristics can effectively reduce heat dissipation, improve energy utilization efficiency, and at the same time shield external thermal interference to ensure process consistency.
4. Precautions during application
Although molybdenum sheets have superior performance, they are prone to generating volatile oxides in an oxidizing environment. Therefore, they need to be used under vacuum or hydrogen/inert gas protection. In addition, carbon and oxygen contamination should be avoided during the processing of molybdenum sheets to maintain their high-temperature performance.
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