Physical vaporous deosition
Thermal decomposition of hexacarbonyl molybdenum is one of the important means to prepare molybdenum coating by physical vapor deposition. The main reaction of carbonyl molybdenum decomposition is that: Molybdenum (CO) 6 / Mo 6CO can be carried out according to the decomposition conditions (temperature, concentration and equipment structure, etc.) according to the homogeneous mechanism (formation of tungsten nucleus in gas phase) and multiphase mechanism (deposition on solid surface). The thermal decomposition of molybdenum (CO) 6 ≤ molybdenum 6CO is simple and feasible. It can be deposited in a wide temperature range (300 ℃) in a vacuum of 133 × (10 × 4 ≤ 10 × 3) Pa. Therefore, this method is widely used to prepare dense molybdenum coating. Molybdenum can also be deposited on a heated molybdenum matrix (such as molybdenum wire). In this case, a compact blank suitable for pressure processing can be obtained.
