Mosten Alloy Co., Ltd.

Leading Supplier of Molybdenum and Tungsten
High Quality & Reasonable Price & Best Service
Applications:
Semiconductor, Solar Energy,
Medical and Aerospace etc.

Product

Mosten Alloy Co., Ltd.

Molybdenum reaction chambers used in semiconductor equipment manufacturing

  • Mosten
  • 1 Sept

It is extremely important to improve energy efficiency, reduce energy consumption, and develop new energy industries. As the MOCVD technology matures, due to cost and growth uniformity considerations, wafers have gradually developed from the traditional 2 inches and 4 inches to 6 inches or even 8 inches. When processing large-size wafers in the existing reaction chamber, under the high temperature environment of the reaction chamber, over-size wafers are likely to cause their own warpage, which affects the uniformity of epitaxial film growth and reduces the yield And stability, and affect the subsequent chip preparation process; and the existing reaction cavity is easy to deform at high temperature and has a short service life. Therefore, the above molybdenum reaction cavity is proposed to solve the above problems.

A molybdenum reaction chamber includes a side plate. The side plate includes an outer molybdenum sheet and an inner molybdenum sheet. The outer molybdenum plate and the inner molybdenum plate are fixed together by a plurality of bolts to form a side plate, and the inner molybdenum plate is located on the outer side. Inside the molybdenum plate, the top end of the side plate is connected with an upper cover, the middle of the upper cover is provided with an observation window, the bottom end of the side plate is fixed with a molybdenum bottom plate, and the inside of the side plate is provided with a molybdenum tray, The upper surface of the molybdenum tray is provided with four wafer grooves, the bottom of each wafer groove is provided with no less than two annular grooves, and the lower surface of the molybdenum tray is provided with exhaust holes, The molybdenum tray is provided with four first vacuuming channels around the air extraction holes, the lower surface of the molybdenum tray is connected with a magnetic fluid shaft, and the magnetic fluid shaft is provided with a second vacuuming channel inside. The bottom end of the shaft extends to the outside of the reaction chamber through a through hole opened in the center of the molybdenum base plate, the part of the magnetic fluid shaft that extends to the outside is sleeved with magnetic fluid, and the top end of the magnetic fluid is connected to the lower surface of the molybdenum base plate, so The bottom end of the magnetic fluid is connected with a sealing cover, and the bottom end of the magnetic fluid shaft extends through the magnetic fluid to the inside of the sealing cover.

The molybdenum reaction chamber is equipped with a vacuum device. When working, the lower surface of the wafer is pumped to a low-pressure state. The pressure difference between the upper and lower surfaces overcomes the deformation force of the high temperature on the wafer, thereby effectively preventing large size The wafer is warped, so that the wafer is always flat and tightly attached to the wafer groove of the tray; the molybdenum reaction chamber is more equipped with a structure that connects the inner molybdenum plate and the outer molybdenum plate to form a side plate with molybdenum bolts. The flexibility of thermal expansion and contraction enables the molybdenum reaction chamber to be balanced as a whole, so that the molybdenum reaction chamber will not be damaged due to high temperature deformation in a short time, and the service life of the molybdenum reaction chamber will be prolonged.