Remolding refractory metals such as tungsten, molybdenum and rhenium by secondary resource utilization
Refractory metals such as tungsten, tantalum, niobium, rhenium and molybdenum have extremely important applications in the high-tech fields involving national security, national economy and people's livelihood such as atomic energy, aerospace, electronic information and medical diagnosis and treatment. Represented by tungsten, our country has the advantage to highlight on the metal, accounts for about more than 60% of the world's total reserves of tungsten, nearly 10 years, the output of tungsten related products have accounted for 80% ~ 90% of global output, namely the world tungsten industry consumed most of tungsten resources from China, this kind of high quality strategic resource reserves in our country has fallen dramatically. Based on this, the application of refractory metals and the utilization of secondary resources have been highly valued.
According to Science and Technology Daily, the Beijing Institute of Technology, the 718 Research Institute of China Shipbuilding Industry Corporation, the China Institute of Atomic Energy and Kunming University of Science and Technology made a major breakthrough in the research on the manufacturing and application of refractory metal high-end products based on secondary resource utilization.
Tan Chengwen, professor of Beijing Institute of Technology, who is in charge of the project team, introduced that through the application of basic research and industrialization, the project team has opened up the industrialization technology of the whole chain from recycling waste, to electronic grade WF6 gas, ultra-high purity tungsten parts and other products, and made a breakthrough in the efficient fluoridation and purification of WF6. High purity tungsten target, tungsten heating body, tungsten crucible, high purity ultrafine tungsten powder based on the use of tail gas plasma chemical method, F2/NF3 and H2 of by-products HF electrolysis and its application in the preparation and reduction of WF6 and other key technologies.
After about 10 years of efforts, the project team has developed a series of high-end products, such as high purity WF6, ultra-high purity tungsten target, high purity tungsten parts for ion implantation machine, high performance tungsten heating body, high purity special-shaped tungsten crucible and so on. Among them, the purity of high-purity WF6 is 99.999%, which meets the high purity requirements of the semiconductor industry for special gas. The domestic market share is 80%, and the international market share is nearly 25%. In only 3 years, the annual output value of a single product is over 100 million yuan, and the profit rate is more than 20%. With the continuous improvement of technology, the consumption of products in related enterprises has increased significantly, breaking the foreign monopoly. The purity of ultra-high purity tungsten target, high purity tungsten parts for ion implantation machine, tungsten heating body and special-shaped tungsten crucible reaches 99.999999%.
Up to now, high purity tungsten components used in ion implantation machines have been put on trial by end users, and high performance tungsten heating body has been applied in the assessment of core components of a major project in the nuclear industry, which ensures the reliability of high temperature and long time assessment experiments. The application of high purity tungsten crucible in crystal industry, such as Shanghai Institute of Optics and Machinery, Chinese Academy of Sciences, will greatly improve the quality of crystal growth and greatly reduce the cost of long crystal; Ultra-high purity tungsten targets are being tested by the most representative semiconductor equipment enterprises in the world. The development of a new structure tungsten deflector module for nuclear fusion jointly developed with the Technical Institute of Physics and Chemistry, Chinese Academy of Sciences is progressing smoothly and has been continuously funded by the Ministry of Science and Technology. It is understood that all kinds of products show excellent market prospects and will greatly enhance the international competitiveness of China's semiconductor and other high-tech fields. Related technologies have also been applied to other refractory metals besides tungsten, such as tantalum, niobium and rhenium.
